# Composition dependence of dielectric and optical properties of Hf-Zr-silicate thin films grown on Si(100) by atomic layer deposition
> Tahir D.

URL kanonis: https://discover.unhas.ac.id/publications/pub_scopus_84986910311
Jurnal / Konferensi: Thin Solid Films
Tahun terbit: 2016
DOI: https://doi.org/10.1016/j.tsf.2016.09.001
ISSN: 00406090
Kuartil SJR: Q2
Citations: 31

## Authors
- Tahir D.

## Abstract
Sourced directly from Elsevier Scopus. No OpenAlex abstract available.

## Keywords
- Analytical Chemistry (journal)
- Dielectric
- Electron energy loss spectroscopy
- Thin film
- Chemistry
- Atomic layer deposition
- Band gap
- Electron
- Atomic physics
- Materials science
- Physics
- Optoelectronics
- Nanotechnology
- Chromatography
- Quantum mechanics

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Sumber: Discover Unhas — RIMS Universitas Hasanuddin.
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