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Universitas Hasanuddin
Research output:Contribution to journal›Article›peer-review
Composition dependence of dielectric and optical properties of Hf-Zr-silicate thin films grown on Si(100) by atomic layer deposition
Tahir D.
Thin Solid Films
Q2Published: 2016Citations: 31
Abstract
Sourced directly from Elsevier Scopus. No OpenAlex abstract available.
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10.1016/j.tsf.2016.09.001Other files and links
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Analytical Chemistry (journal)Sciences
DielectricSciences
Electron energy loss spectroscopySciences
Thin filmSciences
ChemistrySciences
Atomic layer depositionSciences
Band gapSciences
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Atomic physicsSciences
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