Influence of annealing on structural and optical properties of n-TiO2 thin films grown by sol-gel spin coating

Abstract

Abstract The influence of thermal annealing to the properties of n -TiO 2 thin films fabricated by sol-gel spin coating has been investigated using X-ray diffraction (X-RD) and UV-Vis optical transmittance measurements. TiO 2 thin films were prepared by dissolving TiO 2 Nano-powders into a solvent of ethanol and it becomes sol-gel. The sol-gel of TiO 2 was deposited on indium tin oxide (ITO) substrate. Then, the TiO 2 the thin films were inserted into tube furnace for annealing in the temperature range of 300 0 C to 500 0 C during 60 minutes. Based on the xray diffraction results, the crystal structure of TiO 2 is anatase phase structures. The crystalline size of TiO 2 films after annealing at 300°C was 46.6 nm and it slightly decreased to 46.2 nm after annealing at 500°C. The optical transmittance value of TiO 2 film increased after annealing in comparison before annealing the TiO 2 film.

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